On the relationship between the peak target current and the morphology of chromium nitride thin films deposited by reactive high power pulsed magnetron sputtering

Bristol / IOP Publ. (2009) [Journal Article]

Journal of physics / D, Applied physics
Volume: 42
Issue: 1
Page(s): 015304


Selected Authors

Alami, Jones
Sarakinos, Kostas
Uslu, Fahri
Wuttig, Matthias