Correlation between structure, stress and depositions parameters in DC-sputtered zinc oxide films

New York, NY / American Institute of Physics (2002) [Journal Article]

Journal of vacuum science & technology / A, Vacuum, surfaces, & films
Volume: 20
Issue: 6
Page(s): 2084-2095

Authors

Selected Authors

Kappertz, Oliver
Drese, Robert Jens
Wuttig, Matthias

Identifier

Sources