Synthesis and mechanical properties of BCN coatings deposited by PECVD

Kidlington / Elsevier Science (2003) [Journal Article]

Vacuum
Volume: 68
Issue: 4
Page(s): 335-339

Authors

Selected Authors

Kurapov, D.
Neuschütz, Dieter
Cremer, R.
Pedersen, T.
Wuttig, Matthias

Other Authors

Dietrich, D.
Marx, G.
Schneider, Jochen

Identifier