The effect of the backscattered energetic atoms on the stress generation and the surface morphology of reactively sputtered vanadium nitride films

Amsterdam [u.a.] / Elsevier (2008) [Contribution to a conference proceedings, Journal Article]

Thin solid films
Volume: 516
Issue: 14
Page(s): 4568-4573


Selected Authors

Sarakinos, Konstantinos
Alami, Jones
Severin, Daniel
Karimi, Patrick Mwangi
Wuttig, Matthias