Exploring the potential of serial magnetron co-sputtering
Aachen / Publikationsserver der RWTH Aachen University (2015) [Dissertation / PhD Thesis]
Page(s): VII, 110, XXXIX S. : graph. Darst.
Authors
Selected Authors
Schmidt, Rüdiger Matti
Identifier
- URN: urn:nbn:de:hbz:82-rwth-2015-024832
- REPORT NUMBER: RWTH-2015-02483